| 摘要 |
The purpose of the present invention is to achieve high efficiency by reducing surface concentration of a light receiving surface and increasing impurity concentration under electrodes, while facilitating concentration control of a diffusion layer. At the time of forming a high concentration diffusion layer (5) on a part of a first surface (1A) of a substrate (1) having formed thereon a diffusion layer (2) of a light receiving surface, an impurity in the outermost surface of the diffusion layer (2) of the light receiving surface is taken into a thermally oxidized film (6) by performing thermal oxidation in a state wherein a diffusion source is formed. Consequently, an impurity concentration of the outermost surface of the diffusion layer (2) of the light receiving surface is set lower than the impurity concentration of the inner side. |
