MANUFACTURING METHOD OF AN ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY

摘要

The present invention relates to a method for manufacturing an array substrate for a liquid crystal display device and, more specifically, to a method for manufacturing an array substrate for a liquid crystal display device including a step of collectively etching a silicon thin film, an amorphous silicon (n+ a-Si:H) thin film especially including impurities, and a pure amorphous silicon (a-Si:H) thin film and to an etchant composite used for the collective etching.