发明名称 FILM FORMING APPARATUS
摘要 According to an embodiment of the present invention, a film forming apparatus includes: a discharge unit which discharges a film forming material; a voltage applying unit which makes the film forming material have a high potential with respect to an object to have a film by applying voltage to the film forming material; a mask which is arranged on a location where the mask overlaps an unapplied construction unit in the direction from the discharge unit toward the unapplied construction unit of the object to have a film; and a potential adjustment unit which makes a potential of the mask the same as a potential of the object to have a film.
申请公布号 KR20150113818(A) 申请公布日期 2015.10.08
申请号 KR20150025594 申请日期 2015.02.24
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 TOKOH MASAHIRO
分类号 H01M2/14;H01M2/16 主分类号 H01M2/14
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