| 摘要 |
The present invention relates to an automatic robot cleaning device to clean a vacuum line. The automatic robot cleaning device comprises: a body formed in a size to be inserted into a vacuum line connecting a process chamber and a vacuum pump; a wheel unit installed in the body, formed to be supported in an inner wall of the vacuum line, and to move the body while rolling; a cleaner module installed in one side of the body, and formed to remove powder attached to the inner wall of the vacuum line; and a control unit formed to control a driving of the body and an operation of the cleaner module. |
