ORGANIC LIGHT EMITTING DISPLAY WITH RADIANT HEAT REFLECTOR AND MANUFACTURING METHOD THEREOF

摘要

The present invention relates to a vacuum chamber. The purpose of the present invention is to provide an apparatus capable of improving temperature uniformity and a heating temperature of a substrate by heating the substrate by using a radiant heat reflecting unit comprising a radiation projecting unit passing through the substrate. To achieve this, the vacuum chamber may include: a substrate moving unit which supplies a substrate into the vacuum chamber; a vacuum pump unit which maintains the inside pressure of the vacuumed chamber; a radiation source unit which is arranged countering a first side of the substrate; and a radiant heat reflecting unit which is arranged countering a second side of the substrate and reflects the radiation of the radiation source transmitted to the substrate to the substrate, wherein the radiant heat reflecting unit includes a projection unit heading to the substrate.