| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing method in which an application work is performed in a short period of time using a plurality of syringes and the application form is stable, in view of the problems that it requires time to apply a large area when application is performed with one syringe, and that it is difficult to keep a flowable material to be applied even due to difference (pressure, paste amount, etc.) in syringes when application is performed with a plurality of syringes, which easily causes variation in application and disconnection. <P>SOLUTION: There is provided a method of applying a paste on a substrate which makes a relatively parallel movement over an arbitrary distance in X-axis and Y-axis directions by drawing and applying a predetermined pattern with a flowable material. In the method, the plurality of syringes draw and apply different sub-patterns, which forms one pattern. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
