发明名称 HIGH FREQUENCY SEMICONDUCTOR DEVICE AND FABRICATION METHOD FOR SAME
摘要 <p>A high-frequency semiconductor device, wherein on one surface of a semiconductor substrate, a first insulating layer, an undoped epitaxial polysilicon layer in a state of column crystal, a second insulating layer, and a semiconductor layer are formed in order from a side of the one surface, and a high-frequency transistor is formed in a location of the semiconductor layer facing the undoped epitaxial polysilicon layer with the second insulating layer in between.</p>
申请公布号 EP2814053(A4) 申请公布日期 2015.10.07
申请号 EP20130746456 申请日期 2013.01.30
申请人 SONY CORPORATION 发明人 TSUNEMI HIROKI;YAMAGATA HIDEO;NAGAI KENJI;IBUSUKI YUJI
分类号 H01L21/336;H01L21/02;H01L21/205;H01L21/3205;H01L21/768;H01L21/8234;H01L21/84;H01L23/00;H01L23/48;H01L23/522;H01L27/06;H01L27/08;H01L27/088;H01L27/12;H01L27/13;H01L29/78;H01L29/786;H01L49/02 主分类号 H01L21/336
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