X-ray inspection apparatus for inspecting semiconductor wafers

摘要

An x-ray inspection system comprising: a cabinet, the cabinet containing an x-ray source (100), a sample support (200) for supporting a sample to be inspected, and an x-ray detector (300); and an air mover (138) configured to force air into the cabinet through an air inlet (132) in the cabinet above the sample support (200), wherein the air mover (138) and cabinet are configured to force air through the cabinet from the air inlet (132) past the sample support (200) to an air outlet (150) in the cabinet below the sample support (200). The cabinet may be constructed to provide an x-ray shield. An x-ray system of this type can be used in a clean room environment to inspect items such as semiconductor wafers.