摘要 |
<p>An ink jet recording head is produced to include a substrate having a first and a second surface opposing each other, a common liquid chamber formed by machining the substrate from the second surface so as to reduce the thickness of a part of the substrate, and a plurality of independent ink supply ports that communicate with the common liquid chamber and are through-holes extending through the substrate, and a nozzle structure that is formed on the first surface and has an ink flow path communicating with the independent ink supply ports and an ink ejection orifice communicating with the ink flow path. The process includes patterning a resist applied to the substrate using a photomask for forming the independent ink supply ports, wherein infrared alignment is conducted at a depression of the substrate upon alignment between the photomask and the substrate using an alignment mark.</p> |