发明名称 THERMALLY STABLE OPTICAL SENSOR MOUNT
摘要 Disclosed is an apparatus including a mechanical reference frame and a rigid object mechanically coupled to the reference frame by two or more constraints. The stiffnesses of at least two of the constraints are different from one another, and the relative locations and stiffnesses of the constraints cause a designated point on the rigid object to remain stationary with respect to the reference frame during thermal expansion of the rigid object over a range of temperatures.
申请公布号 EP2777066(A4) 申请公布日期 2015.10.07
申请号 EP20120848391 申请日期 2012.11.08
申请人 ZYGO CORPORATION 发明人 BADAMI, VIVEK, G.
分类号 H01L21/027;G03F7/20 主分类号 H01L21/027
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