发明名称 放射線撮像装置及び放射線撮像システム
摘要 <p><P>PROBLEM TO BE SOLVED: To improve sensitivity of a conversion element, for example. <P>SOLUTION: A radiation imaging apparatus comprises, on an insulating substrate 100, a pixel region in which pixels containing a conversion element 101 which converts radiation to electric charge and a switching element 102 connected to the conversion element 101 are arranged in a state of a matrix. The conversion element 101 comprises: an upper electrode layer 119; a lower electrode layer 115; and a semiconductor layer 117 arranged between the upper electrode layer 119 and the lower electrode layer 115. The upper electrode layer 119 comprises a gap 200 in a region in which at least the semiconductor layer 117 is arranged. <P>COPYRIGHT: (C)2013,JPO&INPIT</p>
申请公布号 JP5789223(B2) 申请公布日期 2015.10.07
申请号 JP20120138127 申请日期 2012.06.19
申请人 发明人
分类号 H01L27/146;G01T1/20;G01T1/24;H01L27/144;H04N5/32 主分类号 H01L27/146
代理机构 代理人
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