发明名称 ラビング装置およびラビング方法
摘要 <p><P>PROBLEM TO BE SOLVED: To make it possible to swivel a liquid crystal display element substrate on a rubbing stage and fix it to the rubbing stage with accurate positioning performed by alignment adjustment, in a configuration having a vacuum suction function for the liquid crystal display element substrate in the rubbing stage. <P>SOLUTION: A rubbing device comprises: an alignment head which is provided in the center of a rubbing stage and which has a function for sucking a central part of a liquid crystal display element substrate and swiveling the liquid crystal display element substrate; and a pneumatic table which is provided in a manner to surround an outer periphery of the alignment head and which has a function for sucking or floating a part other than the central part of the liquid crystal display element substrate. <P>COPYRIGHT: (C)2013,JPO&INPIT</p>
申请公布号 JP5788778(B2) 申请公布日期 2015.10.07
申请号 JP20110260398 申请日期 2011.11.29
申请人 发明人
分类号 G02F1/1337 主分类号 G02F1/1337
代理机构 代理人
主权项
地址