发明名称 |
METHOD OF MANUFACTURING AN ELECTRON SOURCE |
摘要 |
<p>An electron gun with a truncated-cone-shaped cathode with uniform emission current density is efficiently manufactured. A manufacturing method of a cathode electron gun equipped with a supply source for diffusing oxide of a metal element on a single crystal needle of tungsten or molybdenum includes steps of forming a truncated-cone-shape having a flat plane at a single crystal edge serving as the cathode by machining beforehand, thereafter thinning and removing a front layer of the flat plane by a focused gallium ion beam, and re-flattening it.</p> |
申请公布号 |
EP2242084(B1) |
申请公布日期 |
2015.10.07 |
申请号 |
EP20080722768 |
申请日期 |
2008.03.25 |
申请人 |
DENKI KAGAKU KOGYO KABUSHIKI KAISHA |
发明人 |
NAKAHARA, FUMIHIRO;NONOGAKI, RYOZO;TERUI, YOSHINORI |
分类号 |
H01J1/16;H01J1/304;H01J9/02;H01J9/04;H01J37/073 |
主分类号 |
H01J1/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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