| 摘要 |
Provided are a curvature measurement device and a curvature measurement method capable of preventing inability to measure a curvature and improving curvature measurement precision. The curvature measurement device (10) comprises: a laser beam emission part (21) to emit a laser beam; a first polarization beam splitter (22) to split the emitted laser beam into a first laser beam (L1) and a second laser beam (L2) having each different polarization direction and heading direction; a mirror (23) to reflect the first laser beam (L1) to head the first laser beam (L1) and the second laser beam (L2) toward a substrate (W), an object to be measured, in parallel; a second polarization beam splitter (10d) penetrating the second laser beam (L2) mirror-reflected by the substrate (W) and reflecting the first laser beam (L1) mirror-reflected by the substrate (W) in a different direction to the second laser beam (L2); a one-dimensional first position detection element (10e) to detect the incident position of the reflected first laser beam (L1); and a one-dimensional second position detection element (10f) to detect the incident position of the second laser beam (L2) mirror-reflected by the substrate (W). |
