发明名称 ターボ分子ポンプ
摘要 <p><P>PROBLEM TO BE SOLVED: To prevent deposition of a reaction product in a rotor deceleration state, and to reduce power consumption. <P>SOLUTION: At an outer peripheral surface side of a base 13, a pump heater 51 generating heat by electric power of a commercial power supply 81, and a brake resistance 52 generating heat by regenerative power that is electric power obtained by converting regenerative energy of an electric motor 35 are provided. When a rotor 4 is rotated at constant speed, a temperature control circuit 64 controls on/off of the pump heater 51 and a cooler 55a to maintain a temperature of a pump body 1a to a target temperature T<SB POS="POST">α</SB>. When the rotor 4 is instructed to stop, the temperature control circuit 64 controls on/off of the brake resistance 52 in addition to the pump heater 51 and the cooler 55a to raise the temperature of the pump body 1a higher than the target temperature T<SB POS="POST">α</SB>at the constant speed rotation. <P>COPYRIGHT: (C)2013,JPO&INPIT</p>
申请公布号 JP5790458(B2) 申请公布日期 2015.10.07
申请号 JP20110267754 申请日期 2011.12.07
申请人 发明人
分类号 F04D19/04 主分类号 F04D19/04
代理机构 代理人
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