MICRO-PRISM MIRROR EMBEDDED MICROFLUIDIC CHANNEL AND MANUFACTURING METHOD FOR THE MICROFLUIDIC CHANNEL

摘要

Disclosed are a method for manufacturing a high quality micro-prism mirror at low costs, a micro-prism mirror manufactured thereby, and a microfluidic device. The method for manufacturing a micro-prism mirror may include the steps of: forming a Si master mold having a v-shaped trench by etching a silicon wafer having a silicon nitride membrane; forming a polydimethyl siloxane (PDMS) mold by replicating the master mold; forming a microfluidic channel by arranging the PDMS mold on the PDMS plate; forming a micro-prism by filling and hardening UV curable polymer in the microfluidic channel; and forming a reflective coating membrane by coating the hypotenuse of the micro-prism with a reflective material.