发明名称 半導体デバイスにおける無電解ニッケルおよび金めっき
摘要 <p>A method for maintaining non-porous nickel layer at a nickel/passivation interface of a semiconductor device in a nickel/gold electroless plating process. The method can include sequentially electroless plating of each of the nickel layer and gold layer on the device layer to pre-determined thicknesses to prevent corrosion of the nickel layer from reaching the device layer during the electroless gold plating process.</p>
申请公布号 JP5791632(B2) 申请公布日期 2015.10.07
申请号 JP20120548016 申请日期 2010.12.14
申请人 发明人
分类号 C23C18/32;C23C18/42;H01L21/288;H01L21/3205;H01L21/60;H01L21/768;H01L23/522 主分类号 C23C18/32
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