发明名称 |
ARRANGEMENT FOR ACTUATING AT LEAST ONE OPTICAL ELEMENT IN AN OPTICAL SYSTEM |
摘要 |
The invention relates to an arrangement for actuating an element in an optical system, in particular an optical system of a projection exposure apparatus, wherein the optical element is tiltable about at least one tilting axis via at least one joint having a joint stiffness, comprising at least one actuator for exerting a force on the optical element, wherein the actuator has an actuator stiffness which at least partly compensates for the joint stiffness. |
申请公布号 |
EP2926185(A1) |
申请公布日期 |
2015.10.07 |
申请号 |
EP20130796013 |
申请日期 |
2013.11.07 |
申请人 |
CARL ZEISS SMT GMBH |
发明人 |
HAUF, MARKUS;VOGLER, ALEXANDER |
分类号 |
G02B7/18;G02B7/182;G03F7/20 |
主分类号 |
G02B7/18 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|