METHOD OF MANUFACTURING MULTI CHANNEL OPTICAL ATTENUATOR

摘要

The present invention relates to a method for manufacturing a multi-channel variable optical attenuator, comprising the steps of: forming a multi-channel optical waveguide structure having a lower clad layer, multiple core layers and an upper clad layer on a silicon substrate; forming a groove for each channel by etching downward from the upper clad layer to part of the substrate with respect to a groove-forming region for each channel having deviated from the core layers and separating at least part of the region of the lower clad layer, which corresponds to the region of the core layers, from the substrate; performing an exhaust process of primarily filling a photoresistor from the upper clad layer into the groove for each channel, inserting a multi-channel waveguide structure into a chamber and evacuating air to remove foam in the filled photoresistor; and forming a protective layer by secondarily applying a photoresistor to above the upper clad layer and developing the photoresistor to correspond to an electrode pattern to be formed, and forming an electrode layer on top of the upper clad layer exposed with respect to the protective layer. According to the method for manufacturing a multi-channel variable optical attenuator, an electrode layer forming error can be inhibited by performing the process of forming an electrode layer after removing the foam of a photoresistor filled into the groove for each channel.