| 摘要 |
<p>The invention provides an adjustment apparatus, a laser machining apparatus, and an adjustment method, wherein a laser mark are irradiated on a photoconductor according to a predetermined calibration pattern to perform laser calibration, so that the accuracy of laser machining is improved. For this purpose, the photoconductor is irradiated with the laser of a shape for any calibration pattern through a spatial modulation unit (DMD) and the above pattern for the photoconductor is shot. Then the deviation value between the shot shape of the laser mark and the above calibration pattern is calculated. According to the calculated deviation value, transformation parameters for calibration so as to enable the shape of the object to be machined to be consistent with the shape of an input pattern are calculated. According to the calculated transformation parameters, the laser irradiation on the object to be machined is adjusted according to the above input pattern.</p> |
