| 摘要 |
A piezoelectric element includes a metal substrate, an alumina layer, a lower electrode, a piezoelectric layer, and an upper electrode. The metal substrate includes iron as a main component and includes at least aluminum and chromium. The alumina layer is formed on the metal substrate, and the lower electrode is formed on the alumina layer. The piezoelectric layer is formed on the lower electrode, and the upper electrode is formed on the piezoelectric layer. The alumina layer is mainly formed of particles in a ³-alumina phase. |
