| 摘要 |
According to an embodiment of the present invention, a microphone comprises: a substrate which includes a through-hole; a vibration film which is disposed on the substrate, and envelops the through-hole; and a first sub-vibration film which is disposed on the vibration film, is separated from the vibration film, and comprises a fixed electrode which includes multiple air inlet. The vibration film includes a first sub-vibration film which is disposed on the substrate, envelops the through-hole, and includes multiple first slots; and a second sub-vibration film which is disposed on the first sub-vibration film, is connected to the first sub-vibration film, and includes a connecting part and multiple second slots. The first sub-vibration film has flexibility, and the second sub-vibration film has rigidity. |
