MEMS microphone device and method for making same

摘要

The present invention discloses a MEMS microphone device and its manufacturing method. The MEMS microphone device includes: a substrate including a first cavity; a MEMS device region above the substrate, wherein the MEMS device region includes a metal layer, a via layer, an insulating material region and a second cavity; a mask layer above the MEMS device region; a first lid having at least one opening communicating with the second cavity, the first lid being fixed above the mask layer; and a second lid fixed under the substrate.

主权项

1. A MEMS microphone device, comprising:
a substrate including a first cavity; a MEMS device region above the substrate, wherein the MEMS device region includes at least one metal layer, at least one metal via layer, an insulating material region and a second cavity, wherein a portion of the at least one metal layer and a portion of the at least one metal via layer form a membrane and the second cavity is formed below the membrane; a mask layer above the MEMS device region; a first lid having at least one opening communicating with the second cavity and the first cavity, the first lid being fixed above the mask layer; and a second lid fixed under the substrate.