发明名称 Stressed substrates for transient electronic systems
摘要 A stressed substrate for transient electronic systems (i.e., electronic systems that visually disappear when triggered to do so) that includes one or more stress-engineered layers that store potential energy in the form of a significant internal stress. An associated trigger mechanism is also provided that, when triggered, causes an initial fracture in the stressed substrate, whereby the fracture energy nearly instantaneously travels throughout the stressed substrate, causing the stressed substrate to shatter into multiple small (e.g., micron-sized) pieces that are difficult to detect. The internal stress is incorporated into the stressed substrate through strategies similar to glass tempering (for example through heat or chemical treatment), or by depositing thin-film layers with large amounts of stress. Patterned fracture features are optionally provided to control the final fractured particle size. Electronic systems built on the substrate are entirely destroyed and dispersed during the transience event.
申请公布号 US9154138(B2) 申请公布日期 2015.10.06
申请号 US201314052348 申请日期 2013.10.11
申请人 Palo Alto Research Center Incorporated 发明人 Limb Scott J. H.;Whiting Gregory L.;Garner Sean R.;Lu JengPing;DeBruyker Dirk
分类号 H01L21/64;H01L21/71;H01L23/14;H01L27/00;H03K19/177 主分类号 H01L21/64
代理机构 Bever, Hoffman & Harms, LLP 代理人 Bever, Hoffman & Harms, LLP
主权项 1. A transient electronic device comprising: a stressed substrate including at least one tensile stress layer having a residual tensile stress and at least one compressive stress layer having a residual compressive stress and being operably integrally connected to the at least one tensile stress layer such that residual tensile and compressive stresses are self-equilibrating; and a trigger mechanism attached to the stressed substrate and including means for generating an initial fracture in said stressed substrate, wherein said residual tensile and compressive stresses are sufficient to generate secondary fractures in response to said initial fracture that propagate throughout said stressed substrate, whereby said stressed substrate is powderized.
地址 Palo Alto CA US