Lateral over-moded bulk acoustic resonators

摘要

A bulk acoustic resonator assembly and methods for fabricated the resonator assembly is provided. The resonator includes a cavity on a first surface of a substrate, with a sheet of low acoustic loss material suspended over the cavity. The sheet of low acoustic loss material is configured such that an associated fundamental frequency of the sheet of low acoustic loss material is a function of a length of the sheet of low acoustic loss material in a direction parallel to the first surface of the substrate. A transducer includes an electromechanical layer on the sheet of low acoustic loss material and a patterned conductive material formed on the electromechanical material. The transducer is configured to induce vibrations in the low acoustic loss material upon application of an electrical signal to the conductive pattern.

主权项

1. A bulk acoustic resonator assembly comprising:
a substrate, having a first surface, the first surface having a cavity; a sheet of low acoustic loss material configured such that an associated fundamental frequency of the sheet of low acoustic loss material is a function of a length of the sheet of low acoustic loss material in a direction parallel to the first surface of the substrate, the sheet of low acoustic loss material being suspended over the cavity; and a transducer, comprising an electromechanical material formed on and in contact with a given surface of the sheet of low acoustic loss material opposite the cavity and a patterned conductive material formed on the electromechanical material, the transducer being configured to induce vibrations in the low acoustic loss material upon application of an electrical signal to the conductive pattern, wherein the low acoustic loss material comprises one of yttrium-aluminum-garnet, Gadolinium-Gallium-Garnet (GGG), and Spinel.