Pattern forming device, pattern forming method, and device manufacturing method

摘要

Presented are methods for forming a predetermined pattern in a predetermined area of an elongated sheet material. The methods include applying a two-dimensional tension to a portion including the predetermined area of the sheet material, and allowing a flat reference surface to adsorb a rear surface portion corresponding to the predetermined area of the sheet material applied with the two-dimensional tension. The methods then illuminate an energy beam corresponding to the pattern to the predetermined area of the sheet material adsorbed to the reference surface.

主权项

1. A pattern forming method of forming a predetermined pattern in each of a plurality of predetermined areas aligned in a longitudinal direction of an elongated sheet material, the pattern forming method comprising:
locating a stage, which has a reference surface and is configured to flatly support the sheet material with the reference surface, by moving the stage in the longitudinal direction so that a predetermined area selected from the predetermined areas of the sheet material faces the reference surface of the stage; applying a two-dimensional tension to the predetermined area of the sheet material by adsorbing the sheet material at several portions with adsorbing-holding members that are provided on the stage and outside the reference surface while driving the adsorbing-holding members on the stage along a two-dimensional plane parallel to the reference surface, the several portions including two portions separated in the longitudinal direction and two portions separated in a width direction orthogonal to the longitudinal direction; allowing the reference surface to adsorb a rear surface portion corresponding to the predetermined area of the sheet material with the two-dimensional tension applied; and illuminating an energy beam corresponding to the pattern to the predetermined area of the sheet material adsorbed to the reference surface.