发明名称 WEB SUBSTRATE PROCESSING SYSTEM
摘要 The purpose of the present invention is to provide a web substrate processing system capable of preventing problems such as particle generation and arcing generation by enabling a web substrate to be wound or unwound while being perpendicular to the ground. The web substrate processing system comprises: a loading roller (100) having a web substrate (W) to be processed wound therearound; one or more rotating drums (200) for transferring the web substrate (W) by rotation while supporting the web substrate (W) unwound from the loading roller (100); an unloading roller (300) for winding the web substrate (W) processed through the rotating drums (200); and a substrate processing part (400) arranged in the circumferential direction of the rotating drums (200) to process the web substrate (W) rotating while being supported on the outer circumference surfaces of the rotating drums (200), wherein problems such as particle generation and arcing generation can be prevented as the web substrate processing system having a rotational axis arranged perpendicularly to the ground provides the loading roller (100), the unloading roller (300) and the rotating drums (200).
申请公布号 KR20150111730(A) 申请公布日期 2015.10.06
申请号 KR20140035465 申请日期 2014.03.26
申请人 VNI SOLUTION CO., LTD. 发明人 CHO, SAENG HYUN
分类号 C23C16/54 主分类号 C23C16/54
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