| 摘要 |
In a substrate processing device, a blocking plate has a first chucking magnetic body (441). The blocking plate ascends by a chamber opening and closing device. A substrate maintaining unit has a movable chuck member (412) and a fixated chuck member. A second chucking magnetic body (442) is installed in the movable chuck member (412). When the blocking plate descends, the blocking plate approaches an upper surface of a substrate (9), and the first chucking magnetic body (441) approaches a second chucking magnetic body (442). The substrate (9) is maintained by a magnetic action between the first chucking magnetic body (441) and the second chucking magnetic body (442); thereby the substrate (9) being maintained in a simple structure. |
