Position detector and autofocus control apparatus using focal point deviation detector

摘要

An autofocus control apparatus includes a beam splitter, a condenser lens and a detector. The beam splitter directs light beams from a light source toward a sample and passes light beams reflected from the sample to the condenser lens. The condenser lens condenses the light beams, and the detector detects a focal point deviation of the sample relative to a focal point of the condenser lens. The focal point deviation is detected based on an intersection of a focal line passing through different focal points of the condenser lens and a light receiving plane configured to receive the light beams passing through the condenser lens.

主权项

1. An autofocus control apparatus comprising:
a light source; a beam splitter configured to direct light beams from the light source toward a sample and to pass light beams reflected from the sample; a condenser lens configured to condense the light beams reflected from the sample and passing through the beam splitter; and a focal point deviation detector including an image sensor and configured to detect a focal point deviation of the sample relative to a focal point of the condenser lens, the focal point deviation detector configured to detect the focal point deviation based on an intersection of a focal line passing through different focal points of the condenser lens with a light receiving plane of the image sensor configured to receive the light beams passing through the condenser lens.