| 发明名称 | Sample, sample fabrication apparatus, and sample observation method | ||
| 摘要 | In accordance with an embodiment, a sample includes a base material and a metal-based heavy element compound. The base material includes a tunnel structure portion with a cavity portion. The metal-based heavy element compound fills the cavity portion of the tunnel structure portion. The metal-based heavy element compound has a thickness that at least locally allows passage of a charged particle beam. | ||
| 申请公布号 | US9151702(B2) | 申请公布日期 | 2015.10.06 |
| 申请号 | US201313971586 | 申请日期 | 2013.08.20 |
| 申请人 | KABUSHIKI KAISHA TOSHIBA | 发明人 | Saijo Fumihiko |
| 分类号 | G01N1/28 | 主分类号 | G01N1/28 |
| 代理机构 | Holtz, Holtz, Goodman & Chick PC | 代理人 | Holtz, Holtz, Goodman & Chick PC |
| 主权项 | 1. A sample comprising: a base material comprising a tunnel structure portion comprising a cavity portion; and a metal-based heavy element compound which fills the cavity portion of the tunnel structure portion, wherein the metal-based heavy element compound has a thickness that at least locally allows passage of a charged particle beam. | ||
| 地址 | Tokyo JP | ||