Negative tone molecular glass resists and methods of making and using same

摘要

The various embodiments of the present disclosure relate generally to resists and, more particularly, to negative tone molecular glass resists, and their associated methods of fabrication and use. In one embodiment of the present invention, a negative tone molecular glass-based resist comprises: a molecular glass, comprising, a molecular glass core, wherein the molecular glass core is not a polymer chain, and a functional group bound to the molecular glass core and configured to provide a decrease in solubility of the molecular glass; and an initiating component configured to produce a reactive species upon exposure to radiation, wherein the reactive species facilitates the decrease in solubility of the molecular glass.

主权项

1. A negative tone molecular glass-based resist, comprising:
a molecular glass, comprising:
a molecular glass core, wherein the molecular glass core is not a polymer chain; anda functional group bound to the molecular glass core and configured to provide a decrease in solubility of the molecular glass; and an initiating component configured to produce a reactive species upon exposure to radiation, wherein the reactive species facilitates the decrease in solubility of the molecular glass wherein the initiating component comprises a portion of the molecular glass.