| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve stick resistance and breakage resistance of a diaphragm.SOLUTION: On a substrate 32 including a cavity 35, a diaphragm 33 is disposed. A leg piece 36 extending from an outer periphery of the diaphragm 33 is fixed to the substrate 32 by an anchor 38. An upper side of the diaphragm 33 is covered by a back plate 34 that holds a stationary electrode plate 40. On a bottom face of the back plate 34, a plurality of stoppers 43a and 43b protrude towards the diaphragm 33. The stoppers include two kinds of stoppers with different protrusion lengths, and the protrusion length of the stopper 43b provided in the vicinity of a fixed part of the diaphragm 33 or in an area opposing an outer peripheral part of the diaphragm 33 is longer than that of the stopper 43 provided in the other area.</p> |
