发明名称 DETECTION METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide a detection method for executing a setup of taking into consideration a consumption state of a cutting blade, by accurately detecting an outer diameter size of the cutting blade.SOLUTION: A detection method is a method for detecting an outer diameter size of a cutting blade 52 for cutting a workpiece held by a chuck table 3. The detection method comprises the steps of: cutting in a plate-like dummy processing object DM of a uniform thickness held by dummy holding means 4 by the cutting blade; imaging a cross-sectional shape of a cutting groove 95 appearing on at least one side surface 93 of the dummy holding means and measuring the depth D of the cutting groove from the surface 91 of the dummy processing object; and calculating the outer diameter size of the cutting blade from a height H up to an axial position of a spindle 51 from a surface of the dummy processing object when forming the cutting groove and the depth of the cutting groove from the surface of the dummy processing object.</p>
申请公布号 JP2015174205(A) 申请公布日期 2015.10.05
申请号 JP20140054393 申请日期 2014.03.18
申请人 DISCO ABRASIVE SYST LTD 发明人 OKANO AYUMI;MITANI SUNAO;TSUCHIYA YOSHISHIRO;ISHII TAKAHIRO
分类号 B24B47/22;B24B27/06;H01L21/301 主分类号 B24B47/22
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