| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an acoustic sensor and an ultrasonic probe that can easily and efficiently obtain a signal from a piezoelectric member with high accuracy without increasing costs or trouble.SOLUTION: A semiconductor chip having two or more transistors is provided; piezoelectric substance thin films are connected to at least two of the transistors and are laminated and disposed directly or indirectly on a semiconductor substrate so that a state of electric conduction changes according to acoustic pressure entering the piezoelectric substance thin films; and the two or more transistors are so connected as to form a single amplifier circuit from which a signal corresponding to the state of electric conduction of each of at least two transistors is output after being added and amplified.</p> |
