SEMICONDUCTOR INSPECTING APPARATUS AND METHOD OF INSPECTING SEMICONDUCTOR DEVICE USING THE SAME

摘要

A semiconductor inspecting device according to the present invention comprises: a stage for loading a semiconductor device including inner terminals arranged between first and second substrates and a filling material; an electromagnetic wave generating part for irradiating electromagnetic waves to the filling material between the first and second substrates in a direction parallel to the upper surface of the first substrate; and an electromagnetic wave detecting part for detecting the irradiated electromagnetic waves. The electromagnetic wave generating part scans the filling material while moving in a moving direction perpendicular to the irradiating direction of the electromagnetic waves.