发明名称 CUTTING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a cutting method capable of suppressing occurrence of burrs when cutting a workpiece containing a metal of ductile material on at least a scheduled cutting position.SOLUTION: A cutting method for cutting a workpiece containing a metal on at least a scheduled cutting position by means of a cutting blade includes a cutting step of cutting the scheduled cutting position of the workpiece by means of a cutting blade, while supplying a cutting fluid to a processing point where the cutting blade cuts into the workpiece. The cutting fluid contains an organic acid and an oxidizer.
申请公布号 JP2015177089(A) 申请公布日期 2015.10.05
申请号 JP20140053195 申请日期 2014.03.17
申请人 DISCO ABRASIVE SYST LTD 发明人 TAKENOUCHI KENJI
分类号 H01L21/301;B24B27/06 主分类号 H01L21/301
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