| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a suction frame member capable of enhancing the production yield and the assembly workability.SOLUTION: A suction frame member 11 includes a frame member 12, and a suction member 13 which can be sucked thereto detachably. The suction member has a suction part 13a formed of a heat-resistant resin, and arranged above the opening of the frame member, and at least two frame holding parts 13c coupled to the suction part and holding the frame member. Each frame holding part 13c includes an outer claw and an inner claw 13c1, 13c2 for clamping the inward wall surface and the outward wall surface of the frame member.</p> |
