发明名称 LIQUID SEAL TYPE VACUUM PUMP
摘要 <p>PROBLEM TO BE SOLVED: To provide a liquid seal type vacuum pump capable of taking measures against the excessive compression at low cost.SOLUTION: In the liquid seal type vacuum pump, by supplying liquid into an interior space of casing side plates 40a and 40b, a liquid ring is formed in the interior space of the casing due to a centrifugal force generated by the rotation of an impeller with a motor; the gas taken in an air chamber, which is formed of two adjacent wings 32, the liquid ring, and the side plates, from an inlet port is compressed due to the bulk reduction with the rotation of the impeller; the compressed gas in the air chamber is exhausted from an air exit due to the arrival of the air chamber at an air exit 42 with the rotation of the impeller. The rear side plate 40b having the air exit is provided with elastomer 45 that forms the air chamber just before the air exit 42 together with the two adjacent wings 32 and the liquid ring; the elastomer allows the air chamber just before the air exit to communicate with the air exit by the elastic deformation due to the gas pressure of the air chamber just before the air exit 42.</p>
申请公布号 JP2015175323(A) 申请公布日期 2015.10.05
申请号 JP20140053802 申请日期 2014.03.17
申请人 EBARA CORP 发明人 KAWASAKI HIROYUKI
分类号 F04C19/00;F04C25/02;F04C29/00;F04C29/12 主分类号 F04C19/00
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