APPARATUS AND METHOD FOR FORMING FILM, AND CYLINDRICAL MEMBER HAVING FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a uniform film on a member to be processed using plasma when a plasma ion implantation method is performed in order to form a film on a three-dimensional shaped member.SOLUTION: A method for forming a film comprises: forming plasma using a plasma generation element 14 in a region around a part of a member 11 to be processed in an extending direction in a processing space; applying pulse voltage to the member 11 to be processed; implanting ions formed from a gas in the processing space by the plasma into a thin film formed on the member to be processed 11 by the plasma to form a film on the member 11 to be processed; changing a position at which plasma is formed, by moving the plasma generation element 14 in the extending direction during or after plasma generation and ion implantation; and repeating the plasma generation, the ion implantation and the movement of the plasma generation element in the extending direction.