APPARATUS FOR HEAT TREATMENT OF THIN FILM ELECTRODE AND METHOD FOR HEAT TREAT USING THE SAME

摘要

The present invention relates to a thin film heat treatment device for forming a thin film on a surface of a transparent substrate, which comprises a flash lamp, an upper reflector, and a lower reflector. The thin film heat treatment device enables the lower reflector to reflect light irradiated from the flash lamp and penetrating the transparent substrate to be irradiated, to the transparent substrate and a lower surface of the thin film or the upper reflector.