| 摘要 |
The purpose of the present invention is to efficiently perform an annealing process on a film, as an annealing target, within a short time while preventing negative effects of excessive microwave irradiation. A microwave heating treatment method includes: a first step of heating an object to be treated which has the film, as an annealing target, and a substrate main body on which the film as an annealing target is formed by irradiating the substrate main body with microwaves; and a second step of stopping irradiation of microwaves. Conversion from the first step to the second step is performed at time t2 or less when or after a temperature (T1) of the film to be annealed is the same as a target temperature (T) for heating the film to be annealed or higher. The time t2 is shorter than t4 when a temperature (T2) of the substrate main body reaches the highest level. Preferably ΔT is maximized at t2. |
