TRANSMISSION ELECTRON MICROSCOPE AND METHOD FOR DISPLAYING TRANSMISSION ELECTRON MICROSCOPE IMAGE

摘要

PROBLEM TO BE SOLVED: To provide a transmission electron microscope capable of displaying an image with an emphasized edge in a display unit.SOLUTION: A transmission electron microscope 100 includes: an electron beam source 2 which generates an electron beam EB; an irradiation lens system 4 which irradiates a sample S with the electron beam EB from the electron beam source 2; an objective lens 8 which forms an image of the sample with the transmitted electron beam EB; a projection lens 12 which projects the transmission electron microscope image formed by the objective lens 8; an imaging unit 14 which images the transmission electron microscope image projected by the projection lens 12; a display control unit 22 which controls the display of the transmission electron microscope image imaged by the imaging unit 14 in the display unit 20 at a predetermined reduction ratio; and a control unit 24 which controls the objective lens 8. The control unit 24 controls the amount of insufficient focus on the basis of the reduction ratio.