METHOD AND DEVICE FOR FORMING SEALING STRUCTURE, ORGANIC EL ELEMENT STRUCTURE, AND METHOD AND DEVICE FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a sealing structure, in which an organic compound of a light-emitting part can be prevented from being deteriorated due to moisture.SOLUTION: An element lamination part 12 composed of an anode film 14 sequentially laminated, a light emitting part 15 including an organic compound and a cathode film 16 is covered with a first barrier film 18 of aluminum oxide formed by an ALD method. The first barrier film 18 is covered with an organic film 19 formed by a CVD method. The organic film 19 is subjected to anisotropic etching and furthermore the first barrier film 18 is covered with a second barrier film 20 of silicon nitride.