| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide charged particle beam irradiation device and method that can shorten the time required for sample processing and observation.SOLUTION: A controller 20 controls an irradiation unit for irradiating an electron beam B1 so that the irradiation current amount of the electron beam B1 to be applied to a processing target area is larger than the irradiation current amount of the electron beam B1 to be applied to a non-processing area, and a pulse having a predetermined pulse duty ratio is output. A detection signal amplifier 18 sets the gain of a detection signal during an irradiation time of the charged particle beam to the processing target area to be lower than the gain of a detection signal during an irradiation time of the electron beam B1 to the non-processing area, and amplifies the detection signal. An image constructing unit 30 constructs an observation image for observing the state of a powder sample 13 by using the amplified detection signal.</p> |
