| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve measurement accuracy of an eddy current sensor.SOLUTION: An eddy current sensor 210 is a sensor for measuring a film thickness of a polishing object 102. The eddy current sensor 210 includes a sensor coil 260 which allows the polishing object 102 to generate an eddy current and detects an induction magnetic field due to the generation of the eddy current. The eddy current sensor 210 also includes a conductor 500 arranged at a side of the polishing object 102 of the sensor coil 260. The conductor 500 is arranged between the sensor coil 260 and a polishing pad 108 interposed between the polishing object 102 and the sensor coil 260. The conductor 500 includes a facing part 510 facing the sensor coil 260, and an outer peripheral part 520 which is connected to the facing part 510 and covers at least a part of a periphery of the sensor coil 260.</p> |
