| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method capable of manufacturing a cylinder type sputtering target material inexpensively and stably while facilitating insertion of a cylinder molding into a metallic capsule.SOLUTION: A method of manufacturing a cylinder type sputtering target material includes the processes of: obtaining a plurality of cylinder type moldings; inserting and stacking a plurality of cylinder type moldings into a cylinder body having an inner peripheral surface along outer peripheral surfaces of the cylinder type moldings; inserting a shaft body having an outer peripheral surface along inner peripheral surfaces of the cylinder type moldings into the stacked cylinder type moldings; forming a metallic capsule by covering the whole of the stacked cylinder type moldings with the cylinder body, the shaft body, and a cover body and sealing the metallic capsule under reduced pressure; and subjecting the metallic capsule to a hot isostatic press process so as to obtain a cylinder type sintered body.</p> |
