| 摘要 |
PROBLEM TO BE SOLVED: To provide a physical amount sensor having excellent detecting accuracy and a highly reliable altimeter, electronic equipment and traveling object having the physical amount sensor.SOLUTION: A physical amount sensor 1 includes: a bendable and deformable diaphragm 24; a peripheral wall part 26 disposed in the periphery of the diaphragm 24 with thickness increasing in a direction separated from the diaphragm 24; a bending amount sensor 3 for detecting the bending amount of the diaphragm 24; and a temperature sensor 6 disposed in the peripheral wall part 26. Also, the peripheral wall part 26 has a taper shape with thickness gradually increasing in a direction separated from the diaphragm 24. |
