发明名称 |
OPTICAL COMPONENT, METHOD FOR MANUFACTURING OPTICAL COMPONENT, ELECTRONIC EQUIPMENT, AND TRAVELING OBJECT |
摘要 |
<p>PROBLEM TO BE SOLVED: To prevent the peeling of a film due to the rapid release of a residual stress which has occurred in film formation, and to prevent the deterioration of optical characteristics due to the irregular reflection of an optical signal.SOLUTION: An optical multilayer film filter 10 as an optical component includes: a glass substrate 11 as an optical substrate; and an inorganic thin film 2 as a film disposed on the glass substrate 11. The inorganic thin film 2 has a first area 12 and a second area 15 surrounding the first area 12, and continuously extending from the first area 12, and the second area 15 is characterized such that the thickness of the inorganic thin film 2 is increased toward an outer peripheral edge 16 of the second area 15 to a boundary 14 between the second area 15 and the first area 12.</p> |
申请公布号 |
JP2015175865(A) |
申请公布日期 |
2015.10.05 |
申请号 |
JP20140049807 |
申请日期 |
2014.03.13 |
申请人 |
SEIKO EPSON CORP |
发明人 |
FURUSATO HIROYOSHI;URABAYASHI SHINICHI;KITAHARA NAOKI |
分类号 |
G02B5/28;C23C14/24 |
主分类号 |
G02B5/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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