| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an acoustic sensor, an ultrasonic probe and ultrasonic diagnostic equipment capable of easily forming a piezoelectric member with high accuracy.SOLUTION: In a semiconductor chip: piezoelectric substance thin films are laminated and disposed directly or indirectly on a semiconductor substrate; a state of electric conduction in a prescribed region of the semiconductor substrate changes on the basis of the quantity of electric charge induced by the piezoelectric substance thin films according to acoustic pressure entering the piezoelectric substance thin films; and a signal corresponding to the state of electric conduction is output.</p> |
