| 发明名称 |
ECHTANT AND METHOD FOR MANUFACTURING CIRCUIT PATTERN USING THE SAME |
| 摘要 |
According to an embodiment of the present invention, provided is an etching solution composed of 100 parts by weight of an etching solution including an oxidizer, acid additives, and water; and 5 to 40 parts by weight of an organic solvent having lower viscosity than water. |
| 申请公布号 |
KR20150109932(A) |
申请公布日期 |
2015.10.02 |
| 申请号 |
KR20140033516 |
申请日期 |
2014.03.21 |
| 申请人 |
SAMSUNG ELECTRO-MECHANICS CO., LTD. |
发明人 |
CHOI, JAE HOON;MAKOTO DOBASHI |
| 分类号 |
C23F1/14;H01L21/308 |
主分类号 |
C23F1/14 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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